A method for manufacturing a high-precision high-voltage module
【Technical Field】
[0001] The present invention relates to a high-precision high-voltage module, which can not only be used as a single module to prepare a portable high-voltage power supply, but also can realize multi-channel high-voltage power supply output through array combination. It is used to meet the high-voltage power supply requirements in various scientific instruments or industrial production equipment.
【Background Technology】
[0002] High-voltage power supplies are widely used in various fields related to national economy and people's livelihood. In oil fume purification, air purification, electrostatic spraying, semiconductor manufacturing equipment, vacuum/plasma treatment processes, various scientific analysis instruments and equipment, and medical diagnosis and treatment systems, various high-voltage power supplies are directly or indirectly used. Especially in scientific research, particle accelerators, free electron lasers, neutron sources, cyclotron sources, capacitor-inductor pulse generator networks, Marx high-voltage pulse generators, capacitor chargers, etc., all require high-voltage power supplies with various performance indicators (power, power consumption, ripple, etc.).
[0003] In the field of nuclear electronics and nuclear detectors, during the development of high-energy physics experiments, nuclear electronics, and nuclear detectors, a large number of high-precision, large dynamic range, and high-stability high-voltage power supplies are used.
[0004] For example, during the testing and research of some key devices, if a short circuit or arcing occurs in the high-voltage components, or if the high-voltage power supply method is unreasonable, or the output control method is improper, the equipment can be easily damaged, resulting in damage to the equipment and sample tubes. Therefore, during the testing process, it is necessary to reasonably select the working mode of the high voltage: independent isolation, common ground protection, etc. There is an urgent need for a power supply with high stability, high precision, multi-channel output, and strong anti-interference capability.
[0005] At the same time, for some large-scale nuclear physics experiments and high-energy physics experiments, the requirements for multi-channel programmable high-voltage power supplies are higher. Not only is programmable logic control required for a single high-voltage channel, but also the stability and reliability of a single high-voltage channel are required.
[0006] For large-scale array high-voltage output power supplies, the core component is the single-channel high-voltage module. Therefore, it is necessary to design a high-precision high-voltage module power supply to meet user needs.
【Summary of the Invention】
[0007] In view of the current state of the art and the needs of scientific research, a high-precision high-voltage module is provided. It uses a 24V low-voltage power supply circuit, through a pulse oscillation power amplifier circuit and a step-up transformer, the 24V voltage is multiplied to a 500V DC high voltage, and then through a voltage multiplier circuit, it is boosted to a maximum DC high voltage output of 5000V. Through a special filter circuit, the ripple of the entire circuit can be controlled within 40mV.
[0008] To achieve the above objectives, the technical solution adopted by the present invention is: a high-precision high-voltage module, characterized in that it includes an input control circuit, a comparison control circuit, a pulse oscillation power amplifier circuit, a step-up transformer, a voltage multiplier circuit, a filter circuit, a voltage divider feedback circuit, and a low-voltage power supply. The input control circuit is sequentially connected to the filter circuit through the comparison control circuit, the pulse oscillation power amplifier circuit, the step-up transformer, and the voltage multiplier circuit. The output of the voltage multiplier circuit is connected to the comparison control circuit through the voltage divider feedback circuit. The low-voltage power supply is connected to the comparison control circuit.
It uses a 24V low-voltage power supply, through the pulse oscillation power amplifier circuit and the step-up transformer, the 24V voltage is multiplied to a 500V DC high voltage, and then through a multi-stage voltage multiplier circuit, it is boosted to a maximum DC high voltage output of 3000V. Through a multi-stage filter circuit, the ripple of the entire circuit is controlled within 40mV.
[0009] The beneficial effects of the present invention are:
1. Using a 24V low-voltage power supply circuit, through the pulse oscillation power amplifier circuit and the step-up transformer, the 24V voltage is multiplied to a 500V DC high voltage, and then through the voltage multiplier circuit, it is boosted to a maximum DC high voltage output of 5000V.
[0010] 2. Through a special filter circuit, the ripple of the entire circuit can be controlled within 40mV.
[0011] 3. The present invention can use various small electronic components. Under the condition of ensuring unchanged performance, after reducing the volume, multiple module units can form a high-voltage plug-in, and each plug-in can achieve 2 to 16 high-voltage channel outputs. Using surface-mount components can further reduce the volume and weight, making it convenient for mass production by placement machines.
[0012] 4. The module is unitized, and through the input control circuit and the module control circuit, precise control of a single module is achieved.
[0013] 5. The module unit is expandable. It can not only be used as a single module to prepare a portable high-voltage power supply, but also can form a multi-channel output power supply through an array.
[0014] In summary, the high-voltage module is small in size, has strong anti-electromagnetic interference capability, low output ripple, high precision, high stability, and can be used to prepare portable high-voltage power supplies.
【Description of Drawings】
[0015] Figure 1 is a circuit connection block diagram of the present invention;
Figure 2 is a comparison control circuit diagram of the present invention;
Figure 3 is a pulse oscillation power amplifier circuit diagram of the present invention;
Figure 4 is a schematic diagram of the step-up transformer of the present invention;
Figure 5 is a schematic diagram of the voltage multiplier circuit of the present invention;
Figure 6 is a schematic diagram of the filter circuit of the present invention;
Figure 7 is a schematic diagram of the voltage divider feedback circuit of the present invention;
Figure 8 is a ripple test result diagram of the high-voltage module of the present invention;
Figure 9 is a ripple test result diagram of the small high-voltage module of the present invention.
【Detailed Description】
[0016] As shown in Figure 1, a high-precision high-voltage module includes an input control circuit, a comparison control circuit, a pulse oscillation power amplifier circuit, a step-up transformer, a voltage multiplier circuit, a filter circuit, a voltage divider feedback circuit, and a low-voltage power supply.
[0017] The circuit connection is: the input control circuit is sequentially connected to the filter circuit through the comparison control circuit, the pulse oscillation power amplifier circuit, the step-up transformer, and the voltage multiplier circuit. The output of the voltage multiplier circuit is connected to the comparison control circuit through the voltage divider feedback circuit. The low-voltage power supply is connected to the comparison control circuit.
[0018] Using a 24V low-voltage power supply, through the pulse oscillation power amplifier circuit and the step-up transformer, the 24V voltage is multiplied to a 500V DC high voltage, and then through a multi-stage voltage multiplier circuit, it is boosted to a 3000V DC high voltage output. Through the filter circuit, the ripple of the entire circuit is controlled within 40mV.
A method for manufacturing a high-precision high-voltage module
[0019] As shown in Figure 2, the specific connection of the comparison control circuit is: the non-inverting input pin 3 of the operational amplifier Ul is respectively connected to the anode of diode D3, one end of resistor R2, and one end of resistor R6; the inverting input pin 2 is respectively connected to the cathode of diode D3, one end of resistor R3, and the negative terminal of capacitor Cl; the other end of resistor R6 is connected to one end of resistor R7; the other ends of resistor R2 and resistor R3 are grounded; the output pin 6 of the operational amplifier UI is respectively connected to the positive terminal of capacitor CI and one end of resistor R4; the negative power supply pin 4 of the operational amplifier UI is grounded; the power supply pin 7 is respectively connected to the cathode of diode D4 and one end of capacitor C8; the other end of capacitor C8 is grounded; the anode of diode D4 is respectively connected to the emitter of transistor Q2 and the +24V power supply; the base of transistor Q2 is connected to the collector of transistor Q3; the base of transistor Q3 is connected to the other end of resistor R4; the emitter of transistor Q3 is grounded through the Zener diode DZl.
[0020] The main function of diode D3 and diode D4 is to prevent voltage reversal. The main function of the operational amplifier Ul is to compare the error between the input signal and the output signal. Through transistors Q2 and Q3, it adjusts the voltage applied to the primary side of the transformer. The entire circuit uses a 5V Zener diode DZl to stabilize the static operating point of transistors Q2 and Q3, ensuring the stability of the output signal.
[0021] The specific models of diode D3 and diode D4 can be IN4148, but are not limited to this model. The specific model of the operational amplifier Ul can be CA3140, but is not limited to this model. The specific models of transistors Q2 and Q3 can be BD912, but are not limited to this model. The specific model of the Zener diode DZl can be LM-336, but is not limited to this model.
[0022] As shown in Figure 3, the specific connection of the pulse oscillation power amplifier circuit is: pin 1 of the step-up transformer Tl is respectively connected to one end of resistor Rl and the positive terminal of capacitor C3; the negative terminal of capacitor C3 is grounded; pin 2 of the step-up transformer TI is connected to the collector of transistor QI; the emitter of transistor Ql is grounded; the base of transistor Ql is connected to pin 3 of the step-up transformer Tl; pin 4 of the step-up transformer Tl is connected through resistor R5 to the other end of resistor Rl, the positive terminal of capacitor C2, and one end of resistor R9; the other end of resistor R9 is respectively connected to the anode of diode Dl and the cathode of diode D2; the cathode of diode Dl and the anode of diode D2 are respectively connected to the negative terminal of capacitor C2 and ground.
[0023] The main function of this circuit is to form a pulse oscillation circuit through diode Dl, diode D2, resistor Rl, resistor R9, and capacitor C2, generating an oscillation pulse of about 30KHz. This oscillation pulse is amplified by the power amplifier transistor Ql to a power of about 3W, and then the amplified pulse is provided to the primary winding of the step-up transformer to ensure the normal operation of the step-up transformer.
[0024] The specific models of diode Dl and diode D2 can be IN4148, but are not limited to this model. The specific model of transistor Ql can be BUT11A, but is not limited to this model.
[0025] As shown in Figure 4, the step-up transformer can transform the 24V low-voltage pulse of the primary winding into a 500V pulse signal of the secondary winding through the transformer, achieving the purpose of voltage increase.
[0026] As shown in Figure 5, the specific connection of the voltage multiplier circuit is: diodes DV1, DV9, DV8, DV7, DV6, DV5, DV4, DV3, DV2, DV1 are connected in series in sequence. Capacitor CV10 is connected between the anode of diode DVlO and the cathode of diode DV9. Capacitor CV9 is connected between the anode of diode DV9 and the cathode of diode DV8. Capacitor CV8 is connected between the anode of diode DV8 and the cathode of diode DV7. Capacitor CV7 is connected between the anode of diode DV7 and the cathode of diode DV6. Capacitor CV6 is connected between the anode of diode DV6 and the cathode of diode DV5. Capacitor CV5 is connected between the anode of diode DV5 and the cathode of diode DV4. Capacitor CV4 is connected between the anode of diode DV4 and the cathode of diode DV3. Capacitor CV3 is connected between the anode of diode DV3 and the cathode of diode DV2. Capacitor CV2 is connected between the anode of diode DV2 and the cathode of diode DVl. The anode of diode DVl is connected to one end of capacitor CVl. Capacitor CV17 and capacitor CV18 are connected in series. Capacitor CV20 and capacitor CV21 are connected in series. Capacitor CV19 and capacitor CV22 are connected in series. Capacitor CV23 and capacitor CV24 are connected in series. Capacitor CV25 and capacitor CV26 are connected in series. Capacitor CV27 and capacitor CV28 are connected in series. One end of capacitor CV17 and capacitor CV20 are respectively connected to one end of capacitor CV10, one end of inductor L2, and the anode of diode DVlO. One end of capacitor CV19, capacitor CV23, capacitor CV25, and capacitor CV27 are respectively connected to the other end of inductor L2. One end of capacitor CV18, capacitor CV21, capacitor CV22, capacitor CV24, and capacitor CV28 are grounded.
[0027] Diodes DVl to DV10 and capacitors CVl to CVlO form a voltage multiplier array, which plays a voltage multiplying role. Through this circuit, the pulse voltage of about 500V can be converted into a DC voltage of up to 3KV/0.5mA, increasing the voltage.
(Note: The original text is incomplete here, but the translation is provided as is.)